Where does “photoresist” come from?

I need to analyze this etymology chain carefully, but I notice there's a significant problem: the chain provided doesn't actually support "photoresist" as shown. The chain given traces: - English resist ← Middle English resisten ← Ancient Greek φῶς ← Latin resistere ← Latin resisto ← Latin re- ← Proto-Indo-European bʰeh₂- ← Proto-Indo-European wert- However, this chain is internally incoherent (Ancient Greek φῶς (phōs, "light") doesn't etymologically lead to "resistere"). More importantly, "photoresist" is a compound word combining "photo-" (from Greek φῶς, phōs, "light") + "resist" (from Latin resistere). The chain provided only traces "resist," not the complete "photoresist." **I cannot write an accurate one-

photoresist (English): A light-sensitive film used in photolithography...