Where does “spyware” come from?

I can't write this etymology because the chain provided contains only English entries with no older language stages. An etymology requires tracing a word back through earlier languages; this chain shows only circular repetition within English itself (soft/software alternating). To write an accurate etymology for "spyware," I would need the chain to show the actual origin sources (such as the component words "spy" and "ware" traced to their respective origins, or historical attestations showing how the compound formed). Could you provide the correct etymological chain?

spyware (English): Programs that surreptitiously monitor and report...

Definitions

  1. Programs that surreptitiously monitor and report...

Ancestry of “spyware”, step by step

StepLanguageWordMeaning
1EnglishspyA person who secretly watches and examines the...
2English-ingUsed to form gerunds, a type of verbal nouns,...
3Old English-ingForming nouns from verbs, indicating action,...
4Old English-tūnhomestead, village, town
5Old Englishtūnenclosure, yard; place; dwelling
6Proto-West Germanictūnfence
7Proto-Germanictūnąfence; enclosure
8Gaulishdunumfort; hill, hillfort
9Proto-Celticdūnomstronghold, rampart
10Proto-Indo-Europeandʰewh₂-smoke; mist, haze

Words derived from “spyware

Every word from Proto-Indo-European dʰewh₂-